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Linear torch with one-dimensional particle distribution

机译:一维粒子分布的线性炬

摘要

The present invention relates to a linear torch having a one-dimensional particle distribution that burns hydrogen in a flame hydrolysis deposition process to form a flame and deposits silica particles generated by oxidation and hydrolysis reactions onto a wafer, wherein the nozzle of the torch is flamed. The nozzle outlet for the raw material gas and the nozzle outlet for the chemical reaction gas are provided, and one side of the nozzle outlet for the chemical reaction gas has a structure larger than the diameter of the wafer. In addition, the nozzle outlet of the linear torch is a rectangle, and has a plurality of rectangular nozzle outlets with coincident central axes, and the nozzle outlet for the chemical reaction gas and the nozzle for the first flame raw material gas from the inside of the plurality of rectangular nozzles to the outside. The outlet and the nozzle outlet for the second flame raw material gas are located, wherein one side of the rectangle of the nozzle outlet for the chemical reaction gas is larger than the size of the wafer.;According to the present invention, since the particle distribution has a one-dimensional linear distribution, a uniform film can be obtained by fixing the wafer and transferring only the torch. In addition, since the particle distribution is wider than that of the circular nozzle outlet and larger than the diameter of the wafer, the deposition time required to obtain a constant thickness can be shortened, which is suitable for mass production.
机译:线性炬管技术领域本发明涉及一种具有一维颗粒分布的线性炬管,该线性炬管在火焰水解沉积过程中燃烧氢以形成火焰并将通过氧化和水解反应产生的二氧化硅颗粒沉积到晶片上,其中,炬管的喷嘴被火焰喷射。提供用于原料气体的喷嘴出口和用于化学反应气体的喷嘴出口,并且用于化学反应气体的喷嘴出口的一侧具有大于晶片直径的结构。另外,线性焊炬的喷嘴出口是矩形的,并且具有多个矩形的,具有中心轴重合的喷嘴出口,并且化学反应气体的喷嘴出口和第一火焰原料气体的喷嘴来自于内部。多个矩形喷嘴向外。设置用于第二火焰原料气体的出口和喷嘴出口,其中用于化学反应气体的喷嘴出口的矩形的一侧大于晶片的尺寸。分布具有一维线性分布,通过固定晶片并仅转移割炬即可获得均匀的膜。另外,由于粒子分布比圆形喷嘴出口宽并且比晶片的直径大,因此可以缩短获得恒定厚度所需的沉积时间,这适合批量生产。

著录项

  • 公开/公告号KR19990011256A

    专利类型

  • 公开/公告日1999-02-18

    原文格式PDF

  • 申请/专利权人 윤종용;

    申请/专利号KR19970034297

  • 发明设计人 송영휘;신동욱;김현수;

    申请日1997-07-22

  • 分类号H01L21/20;

  • 国家 KR

  • 入库时间 2022-08-22 02:17:56

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