Laser-induced metallic plasma for non-contact inspection

摘要

An apparatus for inspecting electrical components having a number of conductive paths, the apparatus comprising: a pair of conductors, each of which conducts laser pulsation involving a conductor (14) of a part to be tested to form a metallic plasma, (10) for performing the probe (16). Finally, the device has a sensor 18 that is responsive to the amount of conduction through the plasma between the conductor and the probe.