Leak Detection System for Liquid Transport Pipes

摘要

The present invention relates to a leak detection system for a liquid transfer pipe, which detects leaking of chemicals transferred through a predetermined pipe in a semiconductor factory due to a defect in a pipe, and easily improves the determination of a leaked part. In a leak detection system of a liquid conveying pipe for detecting a leak of a liquid to be transported in a gas, a leak detection having a contact electrically connected by a plurality of loads in series to a power supply for supplying a predetermined constant voltage and leaking liquid Means are provided for each predetermined position of the leak in the pipe, the leak detection means are connected in parallel one-to-one between each load, the leakage is generated to the load value between the leak detection means the contact is conducted Depending on the voltage level Leakage determination means for determining a leakage state is connected in series to the power source. Therefore, a system for leak monitoring on a pipe for transporting chemicals in a liquid state can be constructed at low cost, and there is an effect of easy maintenance.