Impurity Analysis System of Boron Chloride Gas and Impurity Analysis Method Using Boron Chloride Gas

摘要

Invention impurity analysis system and in the present invention, it relates to an impurity analysis of the BCl ₃ gas method as well as stabilizes the BCl ₃ gas through the stabilizing gas, the stability is secured a gas cabinet and gas analysis equipment of the BCl ₃ gas and By appropriately quantitating it through an analytical computer that manages the analytical data, the effect of impurities contained in the BCl ₃ gas can be properly assessed.