Magnetostrictive Thin Film Silicon Micro Cantilevers

摘要

The following compositional formula for a silicon microstructure having a thickness of about 1 to 20 μm,;Sm _x Fe _y;[Where x and y are atomic%, 23 ≦ x ≦ 58, 42 ≦ y ≦ 77 (where x + y = 100)];or,;Sm _x Fe _y B _z;[Where x, y, z are atomic%, 23 ≦ x ≦ 58, 42 ≦ y ≦ 77, and 0.4 ≦ z ≦ 0.7 (where x + y + z = 100)];As a magnetostrictive alloy thin film silicon micro cantilever coated with a large magnetostrictive alloy thin film made of a, the cantilever of the present invention has a large displacement even at a low magnetic field.