METHOD OF MANUFACTURING ZINC BOROSILICATE GLASS BY SOL-GEL METHOD

摘要

The present invention relates to a method of manufacturing a zinc borosilicate glass used for protecting junctions of high-voltage semiconductor devices, and a chelating agent is added to and stirred in a boron-based raw material, A step of diluting the first raw material with an alcohol to dissolve the second solution in the deionized water to make a third solution; and a step of mixing the first and second solutions first, And adding ammonia water to the resultant mixture to hydrolyze the mixture, and removing the clear portion of the hydrolyzed solution, followed by drying to obtain a glass block and pulverizing the glass block.;This method can extremely increase the purity of glass by using a high purity raw material and can be made into a fine powder, which is very advantageous as a semiconductor protective film quality and has a simple manufacturing process.