ENERGIZATION COIL DEVICE, A METHOD OF MAKING SUCH A DEVICE AND AN ELECTROMAGNETIC MICROMOTOR FITTED THEREWITH

摘要

The energized coil device provided by the present invention comprises a planar support element 30 composed of a semi-conductive substrate and at least one planar coil BI formed on the first layer CI close to the surface of the same substrate. Such a device further comprises at least one second planar coil BS formed near said one surface F1 of the second layer CS substrate superimposed on the first layer CI, these coil layers CI, CS. Forms a monolithic, integrated arrangement with several up and down adjacent layers in a substrate. Such devices are particularly suitable for use in multiphase electromagnetic micromotors to be operated as stepping motors, continuous rotary motors or bidirectional motors.