The present invention relates to an optical axis careful method and an apparatus, and an inspection method using this careful method, which are indispensable when combining optical components such as semiconductor lasers, light receiving elements, and optical waveguides used in optical communication or optical measurement, and optical fibers or arrays thereof. And an inspection apparatus, and an optical module manufacturing method and a manufacturing apparatus using this careful method, which focuses on the light of a semiconductor laser by a lens, finds a converging point, and improves the careful operation of matching the optical fiber end face with it. give. Conventionally, after starting the scanning of the end surface of the optical fiber connected to the power meter in the absence of light, finding the light of the semiconductor laser and finding a part of the light, the optical fiber was moved in the direction of increasing light quantity. It takes too long to find the light, so the cost of the watch is high. It aims to shorten the time for discovering the light of the semiconductor laser and to shorten the careful time as a whole. In the configuration, the semiconductor position detector and the optical fiber are fixed to one support, and the semiconductor position detector is initially used. Facing the lens system, the position of the condensing point on the position detector light-receiving surface is determined. Since the difference between the light collecting point position and the optical fiber position can be calculated, the semiconductor laser and the optical fiber are moved relative to that amount. As a result, the semiconductor laser light converging point and the optical fiber end surface coincide in the range of the error. The optical fiber and the semiconductor laser are moved relative to each other to obtain the maximum amount of light.
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