Constant temperature and humidity chamber with balance for measuring moisture absorption of semiconductor package

摘要

The present invention discloses a chamber for constant temperature and humidity having a scale for measuring the moisture absorption of a semiconductor package. The chamber of the present invention is to provide a moisture absorption atmosphere for measuring the moisture content contained in the package, and the balance includes a sample plate in which a semiconductor package for weight measurement is placed, and a dish tray in which the sample plate is placed. A load cell for measuring the load applied to the dish tray, and an elastic member connected to the sample dish and descending from the original position when the load is applied to the sample dish and restoring to the original position when the load is removed. Include.