to control the process of continuous regeneration of hydrogen парогазовой mixture, going from furnace hydrogen recovery in the production of полупроводнико the model of silicon

摘要

to control the process of continuous regeneration of hydrogen u043fu0430u0440u043eu0433u0430u0437u043eu0432u043eu0439 mixture, going from furnace hydrogen recovery in the production of u043fu043eu043bu0443u043fu0440u043eu0432u043eu0434u043du0438u043au043e the model of silicon, which u0441u0442u0443u043fu0435u043du0447u0430u0442u043eu043c low temperature cooling u043fu0430u0440u043eu0433u0430u0437u043eu0432u043eu0439 mixture and regulate the flow of refrigerant, and the fact that, with to increase the reprocessed hydrogenincreasing the extraction u0442u0440u0438u0445u043bu043eu0440u0441u0438u043bu0430u043du0430 in the u043au043eu043du0434u0435u043du0441u0438u0440u0443u0435u043cu044bu0439 product and reduce energy costs, u0438u0441u043fu0430u0440u0435u043du043du044bu0439 nitrogen coming from the heat exchanger is u0432u044bu043cu043eu0440u0430u0436u0438u0432u0430u0442u0435u043bu044f and to consistently on u0442u0435u043fu043bu043eu043eu0431u043cu0435u043du043du0438u043au0430u043c regeneration process to u043fu0430u0440u043eu0433u0430u0437u043eu0432u043eu0439 mixturebefore entering it in the ordinary heat exchanger distribution depending on the temperature of condensation of the mixture components u0440u0435u0433u0435u043du0435u0440u0438u0440u0443u0435u043cu043eu0439 u043fu0430u0440u043eu0433u0430u0437u043eu0432u043eu0439 two flux of id of which is passed through the heat exchanger, and the other channel on the u043eu0431u0432u043eu0434u043du043eu043cu0443 channel, the relative costs of adjusting flow rate of refrigerant, for instance r of liquid nitrogen by the condensation u0445u043bu043eu0440u0441u0438u043bu0430u043du043eu0432,with the u043fu0430u0440u043eu0433u0430u0437u043eu0432u043eu0439 mixture flowing regeneration, regulate the temperature measured at the reprocessed hydrogen, its withdrawal from the process.