method for measuring the phase difference between two orthogonal polarized components of a prüfstrahls and homodyn interferometer - empfängervorrichtung for implementation of the procedure

摘要

The method is performed on a test beam (103) split (101) into spatially separated components (154, 104). The s-polarised component (154) is phase-delayed (160) and split (155) into one pair of beams (156,157) linearly polarised in orthogonal directions. The undelayed p-polarised component (104) is similarly split (105) into a second pair (106,107). Photodetectors (158,159,108,109) provide electrical signals proportional to the beam intensities for a computer (99) which calculates the phase difference and relative intensities of the s- and p-polarised components.