System for positioning object in nm range using piezo actuator pref. for use in ultra high vacuum and low temp.

摘要

The positioning system uses piezoactuators, arranged so that at least one piezoactive driven transport bearing (4), moving the object to be positioned, in the direct vicinity of a fixed support, holding the object to be positioned, in the direct vicinity of a fixed support, holding the object to be positioned on its deposit surface, lying essentially in the same plane. In addition for the stepwise movement of the object with its transport surface alternately above and below the deposit surface of the fixed support (2) is movable to and from.