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Optical precision measuring device for measuring various parameters of workpieces during manufacture
Optical precision measuring device for measuring various parameters of workpieces during manufacture
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机译:光学精密测量装置,用于在制造过程中测量工件的各种参数
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摘要
The device evaluates the two-dimensional Fresnel diffraction pattern which occurs in a distance sensor due to laser illumination of objects. Evaluation is performed with respect to rising gradient, attenuation, spatial frequency and height.
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