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Method and apparatus for cooling window foils of electron beam accelerator

机译:电子束加速器窗口箔的冷却方法和装置

摘要

A method and apparatus for cooling window foils for extracting electron beams from a scanning type electron beam accelerator, the accelerator includes a primary window foil of double window type and a secondary window foil, the method and the apparatus are characterized by blowing cooling gasses against an electron beam scanning surface from both sides thereof to cool the primary window foil then reversing the flow of the cooling gasses at the center of the primary window foil, and circulating the cooling gasses by sucking the cooling gasses from both sides of the electron beam scanning surface to thereby simultaneously cool the secondary window foil.
机译:用于冷却窗箔以从扫描型电子束加速器提取电子束的方法和设备,该加速器包括双窗型主窗箔和副窗箔,该方法和设备的特征在于,将冷却气体吹向玻璃。从电子束扫描表面的两侧进行冷却以冷却主窗口箔,然后使冷却气体在主窗口箔的中心反向流动,并通过从电子束扫描表面的两侧吸入冷却气体来循环冷却气体从而同时冷却第二窗玻璃。

著录项

  • 公开/公告号US5877582A

    专利类型

  • 公开/公告日1999-03-02

    原文格式PDF

  • 申请/专利权人 EBARA CORPORATION;

    申请/专利号US19960732114

  • 发明设计人 TATSUYA NISHIMURA;

    申请日1996-10-15

  • 分类号H01J7/26;H01J61/52;H01J1/02;H01J7/24;

  • 国家 US

  • 入库时间 2022-08-22 02:08:37

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