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Fused silica lens, microlithography system including a fused silica lens and method of making a fused silica lens
Fused silica lens, microlithography system including a fused silica lens and method of making a fused silica lens
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机译:熔融石英透镜,包括熔融石英透镜的微光刻系统和制备熔融石英透镜的方法
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摘要
A method of producing a fused silica glass by thermally converting a polymethylsiloxane precursor, the lens transmitting ultraviolet radiation at wavelengths below 300 nm. without undergoing a marked absorption transition, the lens so produced, and a microlithography system employing a lens of such glass.
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