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Toughened photosensitive polycyanurate resist, and structure made therefrom and process of making

机译:增韧的光敏聚氰脲酸酯光敏抗蚀剂,由其制成的结构和制备方法

摘要

Disclosed is an admixture which is curable to form a crack resistant, photosensitive polycyanurate resist. Also disclosed is a structure for its use and process of making. The resist can be tailored to be either positively or negatively sensitive to actinic radiation. Because of its improved thermal and mechanical properties, the cured resist is suitable for use at high temperature, such as in electronic packaging applications.
机译:公开了一种可固化形成抗裂的光敏性聚氰脲酸酯抗蚀剂的混合物。还公开了一种用于其用途和制造过程的结构。可以将抗蚀剂定制为对光化辐射正或负敏感。由于其改进的热和机械性能,因此固化的抗蚀剂适合在高温下使用,例如在电子包装应用中。

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