Lensless joint transform optical correlator for precision industrial positioning systems

摘要

A lensless joint transform correlator optically determines the relative position of two pinholes placed in parallel arms of a Mach- Zehnder interferometer. The Fraunhaufer diffraction patterns combine to form a joint power spectrum signal in the joint transform plane. Because of the interference of the two pinhole signals, an encoded lens comprising a Fresnel zone is formed in the joint Fraunhaufer diffraction pattern which is illuminated with a plane wave, and the output signal is taken in the focal plane of the Fresnel zone and magnifies the input pinhole displacement by a factor of ten, enhancing its use in precision positioning servo systems for mask alignment.