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Computer implemented method for estimating fabrication yield for semiconductor integrated circuit including memory blocks with redundant rows and/or columns

机译:用于估计包括具有冗余行和/或列的存储块的半导体集成电路的制造成品率的计算机实现的方法

摘要

A computer is used to estimate a fabrication yield for a semiconductor product under design which includes a plurality of integrated circuit dies, each of which includes a memory cache having a predetermined redundancy scheme in the form of redundant rows and/or columns. A bitmap failure analysis of an existing semiconductor product including a plurality of integrated circuit dies having bitmap failure modes that are comparable to those of the product being designed is performed to obtain a number of failed caches. An observed repair rate is computed as a ratio of a number of the failed caches that can be repaired by the predetermined redundancy scheme to the number of failed caches. A model repair rate for the predetermined redundancy scheme which approximates the observed repair rate is computed using a multiple Poisson model including computed average numbers &lgr; of failures for the failure modes respectively. The numbers &lgr; are optimized by minimizing a least squares difference between the observed repair rates and the model repair rates. The fabrication yield is computed as a predetermined function of the model repair rate including scale factor(s) for the circuit on the wafer being designed. The method can be used to select a redundancy scheme for the wafer by computing fabrication yields for a plurality of candidate redundancy schemes, and selecting the redundancy scheme which has the highest return for additional test, manufacturing and design investment.
机译:使用计算机来估计正在设计的半导体产品的制造成品率,该半导体产品包括多个集成电路管芯,每个集成电路管芯包括具有以冗余行和/或列的形式的预定冗余方案的存储器高速缓存。进行包括多个集成电路管芯的现有半导体产品的位图故障分析,该集成电路管芯具有与正在设计的产品的位图故障模式相当的位图故障模式,以获得许多失败的高速缓存。将观察到的修复率计算为可通过预定冗余方案修复的故障缓存的数量与故障缓存的数量之比。使用包括计算出的平均数&lgr的多重泊松模型来计算用于预定冗余方案的近似维修率的模型维修率。分别针对故障模式的故障。数字&lgr;通过最小化所观察到的修复率与模型修复率之间的最小二乘方差来优化模型。根据模型修复率的预定函数计算制造良率,模型修复率包括要设计的晶圆上电路的比例因子。该方法可用于通过计算多个候选冗余方案的制造良率来选择晶片的冗余方案,并选择对于其他测试,制造和设计投资具有最高回报的冗余方案。

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