Design method and X-ray inspection equipment of X-ray inspection equipment

摘要

PURPOSE: To facilitate designing and at the same time to reduce shooting time and to obtain an improved tomographic image by providing a design standard to optimum dimensions of a detection element and a collimater in a method for designing an X-ray inspection device and the X-ray inspection device. ;CONSTITUTION: An effective maximum path length b of a secondary electron generated by allowing X rays to enter a detection element 20 is calculated and then a width Wd of the sensitive part of the detection element is determined in reference to (a+2b) which is obtained by the effective maximum path length (b) and an effective opening width (a) of the detection element. For example, the width Wd is designed so that (a ≤Wd≤(a+2b) is satisfied. Also, when the maximum path length of the secondary electron of an energy which is equal to the maximum energy of incident X rays is set to c, the width Wd is designed so that (a+2b) Wd(a+2c) is satisfied.;COPYRIGHT: (C)1994,JPO&Japio