The parallel slit pattern discriminator for the interferometer which uses the diffraction grating

摘要

(57) Abstract Target parallel slit pattern separates from the test beam and the access beam and is identified from other parallel slit pattern within the inter- ferro- gram which is made by the interferometer which uses the diffraction grating of the pair which is combined for the second time. The target which the test beam does incidence grading moving to X direction and Y direction inside the plane surface which crosses in the optical axis of the interferometer, changes the field where target parallel slit pattern is bright. The computer, corresponding to the movement of the target, identifies the pixel which possesses the irradiance which changes analyzing inter- ferro- gram making use of only the irradiance data from the pixel which next, is identified, calculates the measurement value of the target surface.