MANUFACTURE OF ATMOSPHERIC PRESSURE-RESISTANT SUPPORT STRUCTURE FOR ELECTRON BEAM DEVICE, ATMOSPHERIC PRESSURE-RESISTANT SUPPORT STRUCTURE FOR ELECTRON BEAM DEVICE AND ELECTRON BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To easily and stably carry out smoothing at a high yield ratio in the case where smoothing a cut surface of an atmospheric pressure-resistant support structure prepared by a cutting machining is carried out in order to prevent a break of the atmospheric pressure-resistant support structure and a surface discharge on a surface of the atmospheric pressure-resistant supporting structure when a wall of an air tight container is supported by the atmospheric pressure-resistant supporting structure in the air tight container of an electron beam device. ;SOLUTION: An insulation substrata 1, i.e., a spacer supporting a wall of an air tight container accommodating an electron releasing element is prepared by cutting a mother material. A fine projection and a fine chip generated on a cut surface 1a by a cutting machining are made to a smooth shape by annealing carried out by heating the cut surface 1a of the insulation substrate 1 at a higher temperature than a softening point of a constitution material of the insulation substrate 1. Break of the insulation substrate caused by a concentration of a stress to the chip of the insulation plate 1 and a concentration of an electric field to the projection and the chip are prevented.;COPYRIGHT: (C)2000,JPO