X-RAY SOURCE AND ELECTRON BEAM SOURCE FOR INDUSTRY USING ELECTRON BEAM ACCELERATOR

摘要

PROBLEM TO BE SOLVED: To provide an electron beam source and an X-ray source formed by an irradiation device capable of spatially uniformly irradiating electron beam and X-ray. ;SOLUTION: For providing an electron beam accelerator having energy of 10 MeV class and power of a few kW or more, being capable of continuous operation without electron beam crossing in an acceleration cavity and an electron beam source and an X-ray source formed with an irradiation device capable of uniformly irradiating electron beam and X-ray by using the electron beam extracted from the accelerator, a coaxial acceleration cavity 30, an accelerator 100 using TM010 mode containing an RM system forming an electromagnetic field of the TM010 mode in the coaxial acceleration cavity as an acceleration mode, and an irradiation devices 70 and 80 containing a means for deflecting horizontally and vertically the electron accelerated by the accelerator 100 and inducing electron beam in radial direction so as to introduce the track of electron beam toward the center of a withdrawing window are disclosed.;COPYRIGHT: (C)2000,JPO