CONDENSABLE GAS RECOVERY APPARATUS FOR RECOVERING CONDENSABLE GAS FROM GAS MIXTURE AND RECOVERY METHOD OF CONDENSABLE GAS USING THE APPARATUS

摘要

PROBLEM TO BE SOLVED: To make storable a highly pure condensable gas while removing an incondensible gas by leading a gas mixture passed through a gas mixture separator to a storage tank in the case where the purity of the condensable gas is high and the purity of the incondensible gas is low, and leading the gas mixture to a compressor in an inverse case. ;SOLUTION: A gas mixture in a gas insulating apparatus 101 is compressed by a gas compressor 103 through a surge tank 102 to be a highly pressurized gas. The gas mixture is then cooled by a cooler 105 and sent to either one of a pair of gas mixture separation apparatuses 106a, 106b through a switching valve 122 and nitrogen gas in the gas mixture is selectively adsorbed in an adsorbent 107a. The resultant gas in which SF6 gas concentration is increased is monitored by a gas concentration meter 108 through a switching valve 124 and the measurement signal is transmitted to a gas concentration control apparatus 111. The gas concentration control apparatus 111 controls the switching valve 125 corresponding to the set SF6 gas concentration to send the resultant gas mixture to a storage tank 109 or a surge tank 102.;COPYRIGHT: (C)2000,JPO