Manufacturing method of chemically modified silicon carbide ceramic powder and silicon carbide ceramics

摘要

PROBLEM TO BE SOLVED: To produce chemically modified silicon carbide ceramic powder by coating the surfaces of silicon carbide ceramic particles with at least one of chemically modified polycarbosilane, polysilazane and polysilane type organosilicon compds. and bonding the coating compd. to the ceramic particles by heat treatment. SOLUTION: At least one of chemically modified polycarbosilane, polysilazane and polysilane type organosilicon compds. is dissolved in an org. solvent and silicon carbide ceramic particles are immersed in the resultant soln. and stirred to coat the surfaces of the ceramic particles with the dissolved compd. This coating compd. is then bonded to the ceramic particles by heat treatment preferably at 800-1,500 deg.C in an inert gas such as Ar. Unnecessary oxygen is not included and the excess org. component of the organosilicon compd. can be removed. During the heat treatment, tight chemical bond is caused between the organosilicon compd. and the silicon carbide ceramic particles and the objective chemically modified silicon carbide ceramic powder is relatively easily obtd.