PURIFICATION OF SULFUR HEXAFLUORIDE INCLUDING SULFUR HEXAFLUORIDE DECOMPOSITION GAS

摘要

PROBLEM TO BE SOLVED: To optimize the throughput and attain the efficiency improvement in purification by treating the gas that is filled in the tightly sealed space under increased or reduced pressure with the first and second solid adsorption layers and setting a flow controller in the flow channels.;SOLUTION: The first solid treatment agent is alkali metal or alkaline earth metal hydroxide or oxide, while the second treatment agent is activated alumina and/or zeolite and they are used at a weight ratio of the former to the latter of 1/(3-7) at the normal temperature. Particularly, the Ca(OH)2 including 8-12 wt.% of NaOH and the activated alumina are effective. The SF6 mixed gas containing SF6 decomposition gas is controlled under the increased pressure of 0-9.9 kg/cm2G or under the reduced pressure of 760-1.0 Torr, in the flow rate of 1-100 m/min by means of the flow controller equipped with the pressure controller 8 and the flow rate controller. The hazardous gas is removed in the reactor 3 equipped with the temperature-controlling heater and cooler 4, a pressure gauge 5, and a thermometer 6 to give the objective purified SF6.;COPYRIGHT: (C)2000,JPO