THREE-DIMENSIONAL PERIODIC STRUCTURE AND TWO- DIMENSIONAL PERIODIC STRUCTURE AS WELL AS THEIR MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To provide a three-dimensional periodic structure formed in such a manner that a photonic band gap effect can be enhanced and a method for manufacturing the same. ;SOLUTION: The respective materials of the three-dimensional periodic structure periodically laminated with plural kinds of the materials 301 and 302 varying in refractive indices in a thickness direction have a film-like shape having two-dimensional periodic ruggedness or two-dimensional periodic net-like shape within one period of the thickness direction and the intra-surface thickness of the regions consisting of the respective materials are modulated within the surface. The front surfaces and rear surfaces of the respective materials 301 and 302 have the two-dimensional periodic ruggedness structure. The raw material of the certain material is made incident from plural directions within the one period of the thickness direction, by which the ruggedness on the front surface of the material is more stressed than the ruggedness on the rear surface. The other certain material is made weaker in the ruggedness on the upper surface than the ruggedness on the rear surface by deposition having readhesion effect or etching. The thickness of the regions consisting of the respective materials are given modulation within the surface by these stages, by which the photonic band gap effect is increased.;COPYRIGHT: (C)2000,JPO