Production manner null of Ti diffusion LiNbO3 optical waveguide type

摘要

PURPOSE: To enable the efficient formation of the optical waveguide and the easy and sure control thereof to a desired refractive index. ;CONSTITUTION: After Ti is diffused into an LiNbO₃ substrate 22 contg. 48.6mol% Li atom, the LiNbO₃ substrate 22 is imposed on a receiving base 36 in a container 30. Sintered powder 34 of LiNbO₃ contg. 49 to 51mol% Li atoms is packed into the casing part member 32 in the container 30. The LiNbO₃ substrate 22 is subjected to a powder heat treatment and the refractive index on the surface side of the LiNbO₃ substrate is lowered by the Li diffused from the outside to the surface of the substrate. As a result, the optical waveguide having an approximately circular shape is obtd.;COPYRIGHT: (C)1993,JPO&Japio