RESONANCE LASER IONIZED NEUTRAL PARTICLE MASS SPECTROMETER AND SPECTROMETRY

摘要

PROBLEM TO BE SOLVED: To provide a resonance laser ionized neutral particle mass spectrome ter for analyzing two or more elements to be detected with high sensitivity.;SOLUTION: This device comprises an ion beam pulsing mechanism 6 consisting of a primary ion source 1, a pulse voltage power source 3, an electrostatic deflecting plate 4, and an aperture 5; an on bean scanning mechanism 9 consisting of a scanning power source 7 and an electrostatic deflecting plate 8; an ion beam lens 10; a sample stage 11; a sample 12; a laser device 14; a mass analyzer 17; a computer 18; and the like. Laser beams 15, 15' are emitted to a neutral particle 13 generated from the sample 12 from the laser device 14, and photo-excited ions 16, 16' of the component to be analyzed are generated and mass analyzed.;COPYRIGHT: (C)2000,JPO