MANUFACTURE FOR THIN-FILM THERMOELECTRIC CONVERSION ELEMENT AND THE THIN-FILM THERMOELECTRIC CONVERSION ELEMENT

摘要

PROBLEM TO BE SOLVED: To form a thermoelectric material thin film having a desirable composition ratios by a method, wherein when the thermoelectric material thin film that changes the conductivity type according to a change in composition ratios is formed on a substrate, substrate temperatures are controlled. ;SOLUTION: Through the use of a thermoelectric material that changes the conductivity type according to a change in the composition ratios, substrate temperatures are controlled, whereby the composition ratio of a thermoelectric material thin film is controlled, thereby forming a desired conductivity type of the thermoelectric material thin film. As a method for controlling the substrate temperatures, the next method is disclosed, namely, in a film former, a heater and cooling means are integrated into a desired pattern in a substrate holder for holding the substrate, or a Peltier element is integrated, disposed, or the like into a desirable pattern, and the temperature distribution is kept on the surface of a substrate holder, whereby the temperature distribution is kept on the substrate, too. Thus, a prescribed temperature distribution is kept on the substrate to form the thermoelectric material, thereby obtaining a p-type or n-type thermoelectric material thin film which maximizes a performance index.;COPYRIGHT: (C)2000,JPO