ATTACHMENT DEVICE AND REPLACEMENT DEVICE, FOR CRUCIBLE ASSEMBLY OR HOT ZONE MEMBER, AND DRIVE CONTROL METHOD OF CRUCIBLE ASSEMBLY REPLACEMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To easily and smoothly attaching or detaching a crucible assembly to or from a crystal pulling-up equipment. ;SOLUTION: This replacement device (or attachment device) is provided with: a vertical movement mechanism 12; a base member 13 that can be elevated or lowered by the vertical movement mechanism 12; an articulated arm 14; a holder member 15 fitted to the base member 13 through the articulated arm 14 so as to be horizontally movable; and three block members 33 for supporting the bottom of a crucible assembly 1, each of which is fitted to the holder member 15 in such a way as to be rotatable in a linked manner with the movement of a rotary mechanism, wherein the holder member 15 is movable in three dimensional directions by the vertical movement mechanism 12 and articulated arm 14, and also, the block members 33 fitted to the holder member 15, act so as to support or release the crucible assembly 1 by the movement of the rotary mechanism. Thus, the crucible assembly 1 can easily and smoothly be transferred from e.g. a transport truck to the pulling-up equipment, or from the pulling-up equipment to the transport truck when removed from the pulling-up equipment.;COPYRIGHT: (C)1999,JPO