GLOW DISCHARGE TREATMENT OF TYPE TO MAKE COMBINATION USE OF HIGH-VOLTAGE PEAK PULSE IMPRESSION AND GLOW DISCHARGE TREATMENT APPARATUS

摘要

PROBLEM TO BE SOLVED: To form a nitrided layer and diffused layer thickly down to the deep depth of an object to be treated without subjecting these layers to post stages and to shorten the glow discharge treatment time. ;SOLUTION: An impulsive glow discharge voltage of about 900 V which is generated by a main circuit and is 10 KH in an inverter frequency is supplied to a treatment vessel (anode) and the object to be treated in the treatment vessel is subjected to a glow discharge treatment. The inverter frequency is made to 100 kHz by delaying the glow discharge voltage by prescribed a slight time from the start of the dead time period DT of the glow discharge voltage Δt simultaneously therewith. For example, the high-voltage peak pulses belonging to the glow discharge region of about 10 KV are supplied to the anode for high-voltage peak pulses and the object to be treated which is housed in the treatment vessel is subjected to the discharge treatment by these high-voltage peak pulses and, therefore, the temp. is locally raised only in the local part where the arc discharge current flows. The interatom distance is increased and the nitrogen N separated from iron nitride FeN is penetrated deep into the object to be treated. The nitrided layer and diffused layer may thus be rapidly and deeply formed.;COPYRIGHT: (C)2000,JPO