HIGH VACUUM AND HIGH PRESSURE VALVE AND HIGH PRESSURE THERMAL ANALYSIS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a high vacuum and high pressure valve to be interposed between a pressure vessel to repeat a high vacuum and a high pressure and a vacuum pump. ;SOLUTION: A high vacuum and high pressure valve 3A is interposed between a vacuum pump 2 and a pressure vessel 1 in which high pressure gas is introduced after exhaust of a vacuum and opened during exhaust of a vacuum and closed during introduction of high pressure gas. The high vacuum and high pressure valve comprises a casing 11 having a first chamber 12 connected to the pressure vessel 1 side and a second chamber 13 connected to the vacuum pump 2 side, the two chambers being partitioned from each other by a partition wall 14, an opening 15 formed in the partition wall 14 and intercommunicating the first and second chambers 12 and 13, a valve seat 16 ensured at the periphery of the opening 15, a valve element 17 arranged on the first chamber 12 side and contacting with and separating from the valve seat 16, and a shaft 20 for opening and closing the valve element having one end coupled to the valve element 17 and the other end and extending in an airtight manner through the wall of the second chamber 13 and running out to an external part.;COPYRIGHT: (C)2000,JPO