PIEZOELECTRIC ACCELERATION SENSOR, ACCELERATION DETECTION MEANS AND MANUFACTURE OF PIEZOELECTRIC ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide an acceleration sensor capable of detecting acceleration in the prescribed direction, widening a dynamic range, widening a zone or the like. ;SOLUTION: An acceleration sensor 201 is equipped with a longitudinal effect detection part 203 and a lateral effect detection part 204. The longitudinal effect detection part 203 is equipped with a longitudinal effect piezoelectric element 211 comprising a film piezoelectric body 211a and electrodes 211b, 211c formed on a coated board 221 serving as a weight simultaneously. The lateral effect detection part 204 is composed by installing a lateral effect piezoelectric body 213, comprising a film piezoelectric body 213a and electrodes 213b, 213c formed on the coated board 221, so as to be supported in the overhung state near the upper part of a groove-like recess part 10 formed on a board 105. A detection circuit 116 detects acceleration or the like in the prescribed direction based on the outputs of both the longitudinal effect detection part 203 and the lateral effect detection part 204.;COPYRIGHT: (C)2000,JPO