MANUFACTURE OF MICROSTRUCTURE ARRAY, MANUFACTURE OF DIE FOR MICRO-LENS ARRAY, AND MANUFACTURE OF MICRO-LENS ARRAY WITH USE THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a microstructure array, such as a micro-lens array, facilitating enlargement and manufacturing processes, and high in controlling, relatively inexpensive, and small in in-plane distribution. ;SOLUTION: This manufacturing method for a microstructure array includes the processes of: forming an insulating layer 3 on a conductive portion 2 of a substrate 1, forming an opening 4 having a periodic repetitive array pattern on the insulating layer 3, and forming an electrodeposition layer 7 on the opening 4 and the insulating layer 3 through the opening 4 by the electrodeposition of the conductive portion 2 as a negative or positive electrode. The opening 4 is formed both on the periphery of a use area 5 in the microstructure, and in a dummy area 6 in series with the use area 5 and having an array pattern similar thereto.;COPYRIGHT: (C)2000,JPO