MOLECULAR FLUORINE (F2) LASER AND METHOD OF GENERATING AND OUTPUTTING F2 LASER BEAM

摘要

PROBLEM TO BE SOLVED: To provide a molecular fluorine (F2) laser, which effectively selects one of emission lines which emit light rays of a wavelength of 157 nm or so and an F2 laser, which is equipped with a means that makes a selected emission line narrow in band width. ;SOLUTION: A discharge chamber 2, charged with a gas mixture that contains molecular fluorine for generating spectral emission within the wavelength range of 157 to 158 nm including adjacent lines, a pair of electrodes 3a and 3b coupled to a power supply circuit to generate a pulse discharge which gives energy to molecular fluorine, and a resonator which is provided with a first etalon 6 surrounding the discharge chamber 2, are provided respectively. The first etalon 6 selects one of adjacent lines, the selected line is arranged with respect to a line that is selected and maximum in reflectance and a line that is not selected and comparatively low in reflectance, and lines which are not selected are eliminated.;COPYRIGHT: (C)2000,JPO