DESIGN METHOD FOR SPACE FILTER AND MEDIUM HAVING RECORDED DESIGN METHOD EXECUTION PROGRAM

摘要

PROBLEM TO BE SOLVED: To obtain a design method for a new phase type space filter by im proving the light use efficiency of a space filter used in a wafer inspection device or the like to improve the SN ratio. ;SOLUTION: A simulated annealing method is adopted as an optimization calculation technique, and the phase of a space filter is taken as an optimization parameter, and a Fourier transform pattern of a period pattern is used as an input pattern, and a cost function is obtained from the pattern which is obtained by performing Fourier transform again after subjecting the input pattern to phase conversion of the space filter, and the phase value is determined based on this cost function.;COPYRIGHT: (C)1999,JPO