DIAGNOSTIC APPARATUS FOR DETECTING MEANS OF PRESSURE OR TEMPERATURE FOR SATURATED VAPOR

摘要

PROBLEM TO BE SOLVED: To obtain a diagnostic apparatus by which a detecting means can be diagnosed simply while the operation of an apparatus or the like to which the detecting means is attached is being continued by a method wherein the detection value of either the pressure or the temperature of a saturated vapor is used as a reference. ;SOLUTION: The pressure of a saturated vapor which is supplied to a jacket 2 is detected by a pressure sensor 9, and the temperature of the saturated vapor is detected by a temperature sensor 17. The pressure and the temperature of the saturated vapor are decided uncoditionally. When the pressure of the saturated vapor is at 360 mmHg at atmospheric pressure or lower, the temperature of the saturated vapor is at 80°C. When the pressure of the vapor is used as a reference, the temperature sensor 17 is judged to be normal as long as the detected temperature of the vapor is near 80°C. The temperature sensor 17 is judged to be abnormal when the temperature is shifted out of 80°C. One out of the pressure sensor 9 and the temperature sensor 17 can be used as a reference, and whether the is normal or not can be judged. Thereby, whether a detection value is normal or not can be judged without stopping the operation of an apparatus to which a detecting means is attached.;COPYRIGHT: (C)2000,JPO