METHOD FOR DETERMINING DISTANCE BETWEEN NEAR-FIELD PROBE AND SAMPLE SURFACE TO BE INSPECTED AND NEAR-FIELD MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To inspect a soft sample, particularly, its topography by relatively and mutually superposing the vibrating motions of a luster probe and a sample to be inspected to the transverse vibration of the luster probe. ;SOLUTION: A monochromatic light of a fixed wavelength from a laser 9 is guided to a probe tip 15 and emitted therefrom. The light transmitted by a sample 5 is converged by an objective lens 17, and guided to the position shown by a broken line through a filter 19 and a mirror 21. The mirror 21 is foldable so as to guide the passage of light toward a detecting diode 24 and toward a CCD camera 27. The sample can be thoroughly transversely scanned by use of a piezoelectric element 29. A shearing force detection signal, a signal for transverse movement and the light signal detected by a detecting diode 23 are transmitted to a measuring device 37, and the entire scanning data are composed by a microcomputer 39 to form one image.;COPYRIGHT: (C)2000,JPO