WALL STRUCTURE OF HIGH-HEAT FLUX EQUIPMENT AND HEAT FLUX ADJUSTMENT SHEET FOR IT

摘要

PROBLEM TO BE SOLVED: To improve damage resistance by using either of a graphite sheet where a polyimide-based macromolecule is dipped and covers or a sheet where a polyimide-based macromolecular film is heat-treated for changing into graphite. SOLUTION: To obtain a first graphite sheet, expansion graphite is subjected to rolling machining for forming a sheet with a thickness of 0.1-0.5 mm, and at least one type of polyimide-based macromolecule out of polyimide, polycarbodiimide, and polyamideimide are dipped to and cover the sheet. Also, for a second graphite sheet, a polyimide-based macromolecular film is laminated, is pressurized, is subjected to heating formation, is heat-treated at a temperature of 2,500 deg.C or more, and is changed into graphite for forming a graphite sheet, thus performing the insertion between a heat-resistance ceramic block and an inner wall, easily adjusting the pressure of a surface by adjusting the clamping force of a clamping member on the fixing, and adjusting contact heat-resistance. Also, a heat insulator can be easily replaced, thus improving working efficiency.