METHOD FOR CORRECTING DEVIATION OF SPECTRAL ENERGY AXIS AT IDENTIFICATION FOR ANALYSIS ELEMENT

摘要

PROBLEM TO BE SOLVED: To highly accurately and automatically correct a deviation by carrying out an inner product process to each characteristic vector obtained by a predetermined process to measured spectral data and each candidate element data, and selecting an element to be axis-matched from candidate elements based on the process result.;SOLUTION: For example, in order to correct a deviation of a spectral energy axis in identifying elements of a sample surface by an electron probe microanalyzer, first, a peak is detected from measured spectral data with use of a secondary differentiation process or the like and candidate elements are selected in a predetermined method. Each data is normalized with use of a height of a maximum peak. A characteristic vector as a relative intensity to a position of the peak is formed. Peaks of the characteristic vectors are formed in a trapezoid to enable comparison even when the peaks deviate in position. Characteristic vectors of the spectral data and candidate element data are compared, and an inner product of the characteristic vectors is obtained by a predetermined method. An element which has a maximum value of the inner product is selected as an object to be axis-matched.;COPYRIGHT: (C)2000,JPO