PROBLEM TO BE SOLVED: To provide an alignment machine of a work and mask which is capable of eliminating the inconvenience (for example, the case the accuracy determined by image pickup means cannot be achieved by the distortion of a casing and the vibration and heat at the time of working if the guide of the image pickup means are disposed on the casing side) by the mounting positions of the image pickup means and further minimizing the influence of the distortion by the characteristics of the lenses of the image pickup means. ;SOLUTION: This alignment mechanism has the image pickup means 2, 2 for picking up the images of the mask mark Mn for aligning the mask M having patterns and the work mark Wm of the work W, a control mechanism 10 which recognizes, computes, stores and controls the positions of both marks Mm, Wm picked up with the image pickup means 2, 2 and a moving means 7 which aligns the misalignment of both marks Mm, Wm by the control signal from the control mechanism 10. The image pickup means 2, 2 are composed as the alignment mechanism for the work W and mask M disposed via the moving mechanism 5 on a supporting base side (MF, 8) for supporting the mask M or the work W.;COPYRIGHT: (C)2000,JPO
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