PLASMA GENERATOR, ITS CHAMBER INNER WALL PROTECTIVE MEMBER, ITS MANUFACTURE, PROTECTING METHOD FOR CHAMBER INNER WALL AND PLASMA PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a chamber inner wall protective member and its manufacturing method for a plasma generator preventing a yield reduction due to the metal pollution of a semiconductor wafer and a discharge foreign matter, facilitating the removal of a deposited film, reducing the dispersion of heat transfer to a chamber, and allowing uniform plasma processing, to provide the protecting method for the chamber inner wall of the plasma generator, and to provide the plasma generator and a plasma processing method. ;SOLUTION: This chamber inner wall protective member of a plasma generator is provided with a main member having a shape curved with a flat plate into a tubular shape, having an angle against the axial direction of the tube on at least one of both end faces in the curving direction, and having a gap decreased in interval between both end faces and a spacer having the shape to bury the gap between both end faces. A thermosetting resin is molded into a shape that the flat plate is curved into a tubular shape, and the main member is manufactured by the method including a glassy carbonization process.;COPYRIGHT: (C)2000,JPO