METHOD OF FORMING FUNCTIONAL BOND AT BONDING REGION BY INTER-SUBSTRATE JOINT REINFORCED BY APPLICATION OF POSITIVE PRESSURE AND ELEMENT STRUCTURE HAVING FUNCTIONAL BOND

摘要

PROBLEM TO BE SOLVED: To obtain a method for forming a functional bond in which mechanical joint portions and functional bond portions are jointed independently and the functional bond at small regions between substrates is formed through reinforcement by a closed, pressure-reduced atmosphere vessel, and to obtain an element structure therefor. ;SOLUTION: This is a jointing method for obtaining a functional bond between bond regions 3 and 4 of substrates 1 and 2. Structures having the regions 3 and 4 becoming a functional bond and joint regions 5 and 6 having joint portions 13 and 11 for giving a mechanical joint strength between the substrates 1 and 2 and being arranged around the regions 3 and 4 are formed on the substrates 1 and 2, respectively. The region 5 or 6 and the region 3 or 4 of one of the substrates are positioned with respect to the corresponding regions of the other substrate. While applying biasing forces to the substrates 1 and 2, the portions 13 and 11 are jointed in a pressure-reduced atmosphere whose pressure is lower than the atmospheric pressure, thereby obtaining a closed, pressure-reduced atmosphere vessel 16 containing the regions 3 and 4 is formed.;COPYRIGHT: (C)2000,JPO