CLEANING METHOD FOR CATCHING FINE PARTICLE IN ULTRAPURE WATER, FILTER MEMBRANE FOR CATCHING FINE PARTICLE IN ULTRAPURE WATER AND STORAGE AND CARRIAGE METHOD FOR PART

摘要

PROBLEM TO BE SOLVED: To provide a cleaning method for removing effectively polluted fine particles adhered to a filter membrane for catching fine particles used at the time of measuring the number of particles contained in ultrapure water and reducing the volume of ultrapure water passed through the filter membrane and shortening the filtration time at the time of catching fine particles accordingly. ;SOLUTION: As a cleaning water for a filter membrane, anyone of a cleaning water prepared by adding a surface active agent 85 into ultrapure water 43, a cleaning water prepared by adding the surface active agent into an electrolytic cathode water prepared by electrolyzing the ultrapure water 43, a cleaning water prepared by adding the surface active agent into a hydrogen dissolved water prepared by dissolving hydrogen gas into the ultrapure water 43, a cleaning water prepared by adding the surface active agent into an electrolytic anode water prepared by electrolyzing the ultrapure water 43 and a cleaning water prepared by adding the surface active agent into an oxidized gas dissolved water prepared by dissolving one kind selected out of oxygen gas, chlorine gas and ozone gas into the ultrapure water 43 is used. Also preferably the pH adjustment in the cleaning water, the selection of the surface active agent, the temperature rise of the cleaning water and the ultrasonic wave irradiation to the cleaning water are carried out.;COPYRIGHT: (C)2000,JPO