INTERATOMIC FORCE MICROSCOPE PROBER AND INTERATOMIC FORCE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To accurately position a probe sonde on a sample and to provide a prober usable for working and handling a sample by providing a driving device moving a sonde movable independently of a probe on a sample base surface or in the vertical direction to the sample base surface.;SOLUTION: A displacement detector 8 arranged above a probe 6 is provided with an optical system 11 applying light to the probe 6 and an optical position detector 12 detecting a position of reflected light from the probe 6. A prober main body 14 of a prober 13 supports a single probe or a plurality of probes 16 via a vertically driving mechanism 15. The tip lower face of the probe 16 constitutes a prober sonde 17. The position of the prober main body 14 is controlled independently on a sample base 4 by the movement of a self-propelled device such as an inchworm or by inertia drive using a driving device for a scanner 3 in an interatomic force microscope 1 for accurately positioning the sharply pointed prober sonde 17 in an area on the order of micrometer approximately.;COPYRIGHT: (C)2000,JPO