PROBLEM TO BE SOLVED: To provide a measurement error correction technique capable of securing expected accuracy, being advantageous in terms of an equipment cost without the need of improving the mechanical accuracy of a measurement so much and automating measurement and the measurement error correction. ;SOLUTION: Many lattice points are three-dimensionally imagined in the measurement operation space of an automatic three-dimensional measurement device 1 of a gate type, the specified point of the measurement device is successively moved and driven to the lattice points, the difference of a three- dimensional measured value by a reference measurement machine and the command value of drive control is obtained, an error table is prepared and the measurement data of the plural measurement object points of a work are corrected by the error of the error table. The error table of the error generated by external 3 axes for moving and driving an articulated robot 4, the error table for which the inclination angle of a base for attaching the robot is made into the table and the error table of a robot error generated in the articulated robot 4, etc., are prepared and the measurement data are accurately corrected by using the errors of the error tables.;COPYRIGHT: (C)1999,JPO
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