DEVICE FOR PULLING SINGLE SILICON CRYSTAL AND PULLING OF THE CRYSTAL

摘要

PROBLEM TO BE SOLVED: To provide a device for pulling a single silicon crystal, capable of inhibiting the deterioration of a heater and a quartz crucible and simultaneously capable of improving a solidifying rate of melted silicon. ;SOLUTION: This device for pulling a single silicon crystal is provided with heater-lifting means 41 for lifting or lowering a bottom carbon heater 27 independently of a crucible-lifting means 17. This method for pulling the single silicon crystal comprises lifting the bottom carbon heater 27 by the use of the heater- lifting means 41 independently of the crucible-lifting means 17, when a single silicon crystal bar 25 is pulled. The heater-lifting means 41 have support bars 42, driving gears and driving motors 46, respectively. The bottom carbon heater 27 comprises one or more ring-like carbon members concentrically disposed around a support shaft 16. Each of the support bars 42 has auxiliary bars disposed for ring-like carbon members, respectively.;COPYRIGHT: (C)2000,JPO