The field production of thin film sample for transmission electron microscope and observation manner and that device

摘要

PURPOSE: To observe a sample without being contaminated by emitting a focused ion beam to the sample under the observation with a transmission type electron microscope, and observing a specified local area of the sample simultaneously with polishing. ;CONSTITUTION: A focused ion bean(FIB) column 1 is mounted obliquely above and in front of the sample chamber of a scanning transmission type electron microscope, so that a beam can be guided to a sample position from the obliquely upper part of the objective pole piece 2 of the scanning transmission type electron microscope. The scanning type secondary electron detector of the scanning transmission type electron microscope is used also for the drawing with FIB. A thin film preliminarily formed by ion polishing is set in the sample chamber of the scanning transmission type electron microscope. While the electron beam is radiated to the thin film to observe it in real time, an ion beam is radiated to the thin film under observation from the column 1. The beam diameter of the FIB is regulated to set the polishing area, and the scanning speed is regulated to precisely and finely polish the sample surface followed by observation.;COPYRIGHT: (C)1995,JPO