HIGH BANDWITH, DYNAMICALLY RIGID METROLOGY SYSTEM FOR THE MEASUREMENT AND CONTROL OF INTELLIGENT MANUFACTURING PROCESSES

摘要

Apparatus providing real time control of an optical steering element includesa pair of stabilized laser beam directors (52). Each SLBD (52) includes abase, beam pointing, and stabilization apparatus mechanically coupled to thebase (10), three reference beam lasers (13) and a stabilized beam laserattached to the base (10). Each beam pointing and stabilization apparatusincludes an optical steering element and an axis tilt detector. The opticalsteering element is optically coupled to the stabilized beam laser and steersthe stabilized beam laser (56). The reference subsystem includes threereference detectors (58) fixedly positioned relative to a workpiece providinga locally rigid workpiece coordinate system. The three referenced detectors(58) are respectively in optical communication with the three reference beamlasers (13). A processor receives and performs coordinate transforms on thereferenced detector output signals and the tool sensor detector ouput signalsto track a position of the tool relative to the rigid workpiece coordinatesystem.