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OPTICAL ELEMENT OF MULTILAYERED THIN FILM FOR X-RAYS AND NEUTRONS
OPTICAL ELEMENT OF MULTILAYERED THIN FILM FOR X-RAYS AND NEUTRONS
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机译:X射线和中子多层薄膜的光学元件
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摘要
This invention relates to novel methods of producing flat and curved optical elements with laterally and depth graded multilayer thin films, in particular multilayers of extremely high precision, for use with soft and hard x-rays and neutrons and the optical elements achieved by these methods. In order to improve the performance of an optical element, errors in d spacing and curvature are isolated and subsequently compensated.
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